Technology Solutions for High-Purity Gas Delivery Systems for Semiconductor Processes

Ukadaulo wapaipi wapaipi wapamwamba kwambiri ndi gawo lofunikira kwambiri lamagetsi oyeretsera gasi, lomwe ndiukadaulo wofunikira kuti upereke mpweya wofunikira kwambiri mpaka kugwiritsidwa ntchito ndikusungabe khalidwe loyenerera;Ukadaulo wapaipi wapaipi wa gasi wapamwamba kwambiri umaphatikizapo kapangidwe kake koyenera kachitidwe, kusankha zopangira ndi zowonjezera, zomangamanga ndi kukhazikitsa, ndikuyesa.M'zaka zaposachedwa, zomwe zikuchulukirachulukira pazachiyero ndi zodetsa za mpweya woyeretsedwa kwambiri popanga zinthu zama microelectronic zomwe zimayimiridwa ndi mabwalo akuluakulu ophatikizika zapangitsa kuti ukadaulo wamapaipi amipweya yoyera kwambiri ukhale wokhudzidwa ndikugogomezera.Zotsatirazi ndizofotokozera mwachidule za mapaipi apamwamba kwambiri a gasi kuchokera ku zosankha zakuthupiof kumanga, komanso kuvomereza ndi kuyang'anira tsiku ndi tsiku.

Mitundu ya mpweya wamba

Kugawika kwa mpweya wamba mumakampani amagetsi:

Mipweya wamba(Gasi wambiri）: haidrojeni (H₂₎nayitrogeni (N₂oxygen (O₂Argon (A₂), etc.

Mipweya yapaderandi SiH₄ ,PH₃ ,B₂H_{6 ,}A₈H₃ ,CL ,Mtengo wa HCL,CF₄ ,NH_3,POCL_3, Mtengo wa SIH2CL₂ Mtengo wa SIHCL3,NH_3,  Mtengo wa BCL_{3 ,}SIF₄ ,Mtengo wa CLF₃ ,CO,C₂F_6, N2O,F_2,HF,Mtengo wa HBR SF₆…… etc.

Mitundu ya mpweya wapadera nthawi zambiri imatha kugawidwa ngati ikuwonongagasi, poizonigasi, zoyakagasi, zoyakagasi, inegasi, etc. Mipweya ya semiconductor yomwe imagwiritsidwa ntchito kwambiri nthawi zambiri imagawidwa motere.

(i) Zowononga / zapoizonigasi: HCl, BF₃, wf₆, HBr , SiH₂Cl₂, NH₃, PH₃, Cl₂, BCl₃… etc.

(ii) Kutenthagasi:H₂, CH₄, SiH₄, PH₃, ASH3, SiH₂Cl₂, B₂H₆,CH2F ndi_2,CH₃F, CO ... etc.

(iii) kuyakagasi: O₂, Cl₂,N₂O, NF₃… etc.

(iv) Wopanda nzerugasi:N₂, CF₄, C₂F₆, C₄F_8,SF₆, CO₂, Ne, Kr, Iye... etc.

Mipweya yambiri ya semiconductor ndi yovulaza thupi la munthu.Makamaka, ena mwa mpweya, monga SiH₄ kuyaka modzidzimutsa, malinga ngati kutayikira kudzachita mwamphamvu ndi mpweya mumlengalenga ndikuyamba kuyaka;ndi ash₃kwambiri poizoni, kutayikira pang'ono kulikonse kungayambitse chiopsezo cha moyo wa munthu, ndi chifukwa cha zoopsa zodziwikiratu izi, kotero kuti zofunikira za chitetezo cha dongosolo la dongosolo ndizokwera kwambiri.

Kagwiritsidwe ntchito ka mpweya  

Monga zofunika zofunika zopangira makampani amakono, mankhwala gasi chimagwiritsidwa ntchito, ndipo kuchuluka kwa mpweya wamba kapena mpweya wapadera ntchito zitsulo, zitsulo, mafuta, makampani mankhwala, makina, zamagetsi, galasi, ziwiya zadothi, zomangira, zomangamanga, , magawo opangira chakudya, mankhwala ndi zachipatala.Kugwiritsiridwa ntchito kwa gasi kumakhudza kwambiri luso lapamwamba la maderawa makamaka, ndipo ndilofunika kwambiri gasi kapena gasi wopangira.Pokhapokha ndi zofunikira ndi kukwezedwa kwa magawo osiyanasiyana a mafakitale atsopano ndi sayansi yamakono ndi zamakono, malonda a gasi amatha kupangidwa ndi kudumpha ndi malire malinga ndi mitundu, khalidwe ndi kuchuluka kwake.

Kugwiritsa ntchito gasi mumakampani a microelectronics ndi semiconductor

Kugwiritsiridwa ntchito kwa gasi nthawi zonse kwakhala ndi gawo lofunika kwambiri pamayendedwe a semiconductor, makamaka njira ya semiconductor yakhala ikugwiritsidwa ntchito kwambiri m'mafakitale osiyanasiyana, kuchokera ku chikhalidwe cha ULSI, TFT-LCD mpaka makampani amakono a micro-electro-mechanical (MEMS), onse a omwe amagwiritsa ntchito njira yotchedwa semiconductor ngati njira yopangira zinthu.Kuyera kwa gasi kumakhudza kwambiri magwiridwe antchito a zigawo ndi zokolola zamafuta, ndipo chitetezo cha gasi chimagwirizana ndi thanzi la ogwira ntchito komanso chitetezo cha ntchito zamafakitale.

Kufunika kwa mipope yoyenga kwambiri pakunyamula gasi woyenga kwambiri

Pakusungunuka kwachitsulo chosapanga dzimbiri ndikupanga zinthu, pafupifupi 200g ya gasi imatha kuyamwa pa tani.Pambuyo pokonza zitsulo zosapanga dzimbiri, osati pamwamba pake kumamatira ndi zonyansa zosiyanasiyana, komanso muzitsulo zake zachitsulo zimamwanso mpweya wina.Pamene mpweya ukuyenda kudzera mupaipi, zitsulo zimatenga gawo ili la gasi lidzalowanso mu mpweya, kuipitsa mpweya wabwino.Kutuluka kwa mpweya mu chubu kumayenda mosalekeza, chubucho chimatulutsa mpweya wopanikizika, ndipo mpweya ukasiya kudutsa, mpweya womwe umatulutsidwa ndi chubu umapanga kutsika kwamphamvu kuti athetse, ndipo mpweya wothetsedwa umalowanso mu gasi weniweni mu chubu. monga zonyansa.Panthawi imodzimodziyo, kutsekemera ndi kukonzanso kumabwerezedwa, kotero kuti zitsulo zomwe zili mkati mwa chubu zimapanganso ufa wochuluka, ndipo tinthu tating'onoting'ono tazitsulo timayipitsanso mpweya woyera mkati mwa chubu.Makhalidwewa a chubu ndi ofunikira kuti atsimikizire chiyero cha gasi wonyamulidwa, chomwe chimafuna osati kusalala kwambiri kwa mkati mwa chubu, komanso kukana kwambiri kuvala.

Gasi wokhala ndi dzimbiri lamphamvu akagwiritsidwa ntchito, mapaipi achitsulo osapanga dzimbiri amayenera kugwiritsidwa ntchito popanga mapaipi.Kupanda kutero, chitolirocho chidzatulutsa mawanga owononga mkati chifukwa cha dzimbiri, ndipo pazovuta kwambiri, padzakhala malo ambiri ochotsera zitsulo kapena ngakhale kuphulika, zomwe zidzaipitsa mpweya woyera womwe udzagawidwe.

Kulumikizana kwapamwamba kwambiri komanso kuyeretsa kwambiri mpweya wotumizira ndi kugawa mapaipi othamanga kwambiri.

M'malo mwake, onse amawotcherera, ndipo machubu omwe amagwiritsidwa ntchito amafunika kuti asasinthe pagulu akawotcherera.Zida zokhala ndi mpweya wochuluka kwambiri wa carbon zimakhudzidwa ndi mpweya wotsekemera wa mbali zowotcherera pamene kuwotcherera, zomwe zimapangitsa kuti mpweya ulowe mkati ndi kunja kwa chitoliro ndikuwononga chiyero, kuuma ndi ukhondo wa mpweya wofalitsidwa, zomwe zimabweretsa kutaya kwa mpweya. kuyesetsa kwathu konse.

Mwachidule, kwa mpweya woyeretsedwa kwambiri ndi payipi yapadera yotumizira mpweya, m'pofunika kugwiritsa ntchito chithandizo chapadera cha chitoliro chachitsulo chosapanga dzimbiri, kupanga mapaipi apamwamba kwambiri (kuphatikizapo mapaipi, zovekera, mavavu, VMB, VMP) mu kugawa gasi woyeretsedwa kwambiri kuli ndi ntchito yofunika kwambiri.

Lingaliro lazonse zaukadaulo waukhondo wamapaipi opatsira ndi kugawa

Kutumiza kwa gasi koyera komanso koyera ndi mapaipi kumatanthauza kuti pali zofunika zina kapena zowongolera pazinthu zitatu za gasi zomwe ziyenera kunyamulidwa.

Kuyera kwa gasi: Zomwe zili mumlengalenga wonyansa mu gGas chiyero: Zomwe zili mumlengalenga wonyansa mu gasi, zomwe nthawi zambiri zimawonetsedwa ngati kuchuluka kwa chiyero cha gasi, monga 99.9999%, zomwe zimawonetsedwanso ngati chiŵerengero cha voliyumu ya ppm, ppb, ppt.

Kuuma: kuchuluka kwa kuchuluka kwa chinyezi mu gasi, kapena kuchuluka komwe kumatchedwa kunyowa, komwe kumawonetsedwa ndi mame, monga mlengalenga wothamanga mame -70.C.

Ukhondo: kuchuluka kwa tinthu ting'onoting'ono tomwe timakhala mu gasi, kukula kwa tinthu ta µm, tinthu tingati/M3 kuti tifotokoze, pa mpweya woponderezedwa, nthawi zambiri zimawonetsedwanso ndi kuchuluka kwa ma mg/m3 a zotsalira zolimba zosalephereka, zomwe zimakhala ndi mafuta. .

Zowononga kukula gulu: zoipitsa particles, makamaka amatanthauza payipi scouring, kuvala, dzimbiri kwaiye ndi zitsulo particles, mumlengalenga mwaye particles, komanso tizilombo, phages ndi chinyezi munali mpweya condensation m'malovu, etc., malinga ndi kukula kwake tinthu kukula. imagawidwa kukhala

a) Tinthu zazikulu - kukula kwa tinthu pamwamba pa 5μm

b) Tinthu - zakuthupi awiri pakati pa 0.1μm-5μm

c) Tinthu tating'onoting'ono kwambiri - kukula kwa tinthu kosakwana 0.1μm.

Kuti mupititse patsogolo kugwiritsa ntchito ukadaulo uwu, kuti muthe kumvetsetsa kukula kwa tinthu ndi mayunitsi a μm, gulu la tinthu tating'ono tating'ono limaperekedwa kuti tifotokoze.

Zotsatirazi ndi kuyerekezera kwa tinthu tating'onoting'ono